Securing competitiveness in semiconductor production by reducing transport time and improving productivity
by applying the Tool Buffer Control System to the EFEM module that supplies wafers in the cassette
to the process module in the semiconductor line
Buffer installation configuration
Control according to HOST operating scenario
Merit
1. Control according to the operation scenario of HOST (higher S/W)
2. No modification of existing equipment
Demerit
Depending on the operation scenario and communication specifications of the HOST, it is decided whether to modify the buffer or higher operating S/W.
Benefit
GEATSOFT Inc.Address1445 WOODMONT LN. #2000 ATLANTA GA 30318, USA E-MAILkhjeong@geatsoft.comCEOKihong Jeong