Technology development
Global smart IT solution provider GEATSOFTEFEM/TBCS
Securing competitiveness in semiconductor production by reducing transport time and improving productivity by applying the Tool Buffer Control System to the EFEM module that supplies wafers in the cassette to the process module in the semiconductor line
Buffer installation configuration
Control according to HOST operating scenario
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Merit
- 1. Control according to the operation scenario of HOST (higher S/W)
- 2. No modification of existing equipment
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Demerit
- Depending on the operation scenario and communication specifications of the HOST, it is decided whether to modify the buffer or higher operating S/W.
Benefit
